Oxide Etcher System
(Dielectric Etcher System)
(Dielectric Etcher System)
Oxide Etcher (Dielectric Etcher)
| 구분 | 특징 |
|---|---|
| Oxide Etcher (Dielectric Etcher) |
2026년 개발 완료 예정 2028년 양산 판매 예정 |